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Springer Metal Impurities in Silicon-Device Fabrication: 24 (Springer Series in Materials Science, 24)

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£55.29 £52.11 £52.80 £53.50 £54.19 £54.89 £55.58 28 July 2026 16 August 2026 05 September 2026 24 September 2026 14 October 2026
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47 figures, 36 tables

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Description

Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during the fabrication of silicon samples and devices. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine the gettering efficiency. In all of these subjects, reliable and up-to-date data are presented. This monograph provides a thorough review of the results of recent scientific investigations, as well as the relevant data and properties of the various metal impurities in silicon. The new edition includes important recent data and a number of new tables.

Key Features

Used Book in Good Condition

Product Specifications

Format
hardcover
Domain
Amazon UK
Publication Date
18 February 2000
Listed Since
10 December 2006

Barcode

No barcode data available

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