£56.35

Springer Metal Impurities in Silicon-Device Fabrication: 24 (Springer Series in Materials Science, 24)

47 figures, 36 tables

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Description

This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.

Key Features

Used Book in Good Condition

Product Specifications

Format
hardcover
Domain
Amazon UK
Publication Date
18 February 2000
Listed Since
10 December 2006

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