Predictive Simulation of Semiconductor Processing: Status and Challenges: 72 (Springer Series in Materials Science, 72) - Image 1

£108.68

Springer Predictive Simulation of Semiconductor Processing: Status and Challenges: 72 (Springer Series in Materials Science, 72)

Name: Predictive Simulation of Semiconductor Processing: Status and Challenges: 72 (Springer Series in Materials Science, 72)
Brand: Springer
Price: 114.43 GBP
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Nanotechnology

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Description

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Product Specifications

Brand: Springer
Format: Hardcover
ASIN: 3540204814
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electrical > Nanotechnology
Domain: Amazon UK
Release Date: 05 May 2004
Listed Since: 10 December 2006

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Springer Predictive Simulation of Semiconductor Processing: Status and Challenges: 72 (Springer Series in Materials Science, 72)

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