Chemical-Mechanical Planarization of Semiconductor Materials: 69 (Springer Series in Materials Science, 69) - Image 1

£150.73

Springer Chemical-Mechanical Planarization of Semiconductor Materials: 69 (Springer Series in Materials Science, 69)

Name: Chemical-Mechanical Planarization of Semiconductor Materials: 69 (Springer Series in Materials Science, 69)
Brand: Springer
Price: 152.3 GBP
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Physical Chemistry

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Description

This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

Product Specifications

Brand: Springer
Format: hardcover
ASIN: 3540431810
Category: Books > Subjects > Science, Nature & Maths > Chemistry > Physical Chemistry
Domain: Amazon UK
Release Date: 26 January 2004
Listed Since: 18 January 2007

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Springer Chemical-Mechanical Planarization of Semiconductor Materials: 69 (Springer Series in Materials Science, 69)

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