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CRC Press Handbook of Silicon Semiconductor Metrology

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Brand: CRC Press

Mechanics

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

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Used Book in Good Condition

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Brand: CRC Press
Format: hardcover
ASIN: 0824705068
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Civil Engineering > Mechanics
Domain: Amazon UK
Release Date: 29 June 2001
Listed Since: 17 February 2007

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CRC Press Handbook of Silicon Semiconductor Metrology

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