Handbook of 3D Integration, Volume 3: 3D Process Technology - Image 1

£92.19

Wiley Handbook of 3D Integration, Volume 3: 3D Process Technology

Name: Handbook of 3D Integration, Volume 3: 3D Process Technology
Brand: Wiley
Price: 125.0 GBP
Availability: InStock

Mechanics

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Description

Edited by key figures in 3D integration and written by top authors from high-tech companies and renowned research institutions, this book covers the intricate details of 3D process technology. As such, the main focus is on silicon via formation, bonding and debonding, thinning, via reveal and backside processing, both from a technological and a materials science perspective. The last part of the book is concerned with assessing and enhancing the reliability of the 3D integrated devices, which is a prerequisite for the large-scale implementation of this emerging technology. Invaluable reading for materials scientists, semiconductor physicists, and those working in the semiconductor industry, as well as IT and electrical engineers.

Product Specifications

Brand: Wiley
Format: hardcover
ASIN: 3527334661
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Civil Engineering > Mechanics
Domain: Amazon UK
Release Date: 04 June 2014
Listed Since: 17 August 2012

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Wiley Handbook of 3D Integration, Volume 3: 3D Process Technology

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