Handbook of Silicon Semiconductor Metrology - Image 1

£65.64

CRC Press Handbook of Silicon Semiconductor Metrology

Name: Handbook of Silicon Semiconductor Metrology
Brand: CRC Press
Price: 60.71 GBP
Availability: InStock

Electrical Engineering

Price History & Forecast

Last 82 days • 82 data points (No recent data available)

Historical

Generating forecast...

Price Distribution

Price distribution over 82 days • 2 price levels

Days at Price

Current Price

Price Analysis

Most common price: £61 (64 days, 78.0%)

Price range: £61 - £66

Price levels: 2 different prices over 82 days

Description

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.

Product Specifications

Brand: CRC Press
Format: paperback
ASIN: 0367397161
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electrical > Electrical Engineering
Domain: Amazon UK
Release Date: 17 October 2019
Listed Since: 16 October 2019

Barcode

No barcode data available

CRC Press Handbook of Silicon Semiconductor Metrology

Price History & Forecast

Price Distribution

Price Analysis

Description

Product Specifications

Barcode

Similar Products You Might Like

Semiconductor Manufacturing Technology (Advanced Series in Electrical & Computer Engineering)

Handbook of 3D Integration, Volume 3: 3D Process Technology

Semiconductor Process Reliability in Practice (ELECTRONICS)

Crucial Issues in Semiconductor Materials and Processing Technologies: (Closed)): 222 (NATO Science Series E:)

Semiconductor Process and Product Quality Assurance Techniques

Characterization in Silicon Processing (AGENCY/DISTRIBUTED)

High Mobility Materials for CMOS Applications (Woodhead Publishing Series in Electronic and Optical Materials)

Advanced Semiconductor Device Physics and Modeling (Electronic Materials & Devices Library)

Three-Dimensional Integrated Circuit Design (Morgan Kaufmann Series in Systems on Silicon (Hardcover))

Werkstückbegleitender Informationsspeicher als Basis für ein informationstechnisches Konzept für Halbleiterfertigungen: 149 (IPA-IAO - Forschung und Praxis, 149)

Gallium-Nitride (GaN) II (Volume 57) (Semiconductors and Semimetals, Volume 57)

Materials and Device Physics (v. 2) (Materials science library)

Advanced Silicon & Semiconducting Silicon-Alloy Based Materials & Devices

3D Microelectronic Packaging: From Fundamentals to Applications: 57 (Springer Series in Advanced Microelectronics, 57)

Physics of Semiconductor Devices

Trends in Semiconductor Research

The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)

Practices of Wafer Fab Operations

Mixed Analog-digital Vlsi Devices And Technology

Semiconductor Cross Reference

Handbook of Electronic Components: Volume II: 2

Semimagnetic Semiconductors and Diluted Magnetic Semiconductors: International Proceedings: Vol 55 (Ettore Majorana International Science Series / Physical Sciences)

Analysis and Simulation of Semiconductor Devices

Mechanics of Microelectronics: 141 (Solid Mechanics and Its Applications, 141)