£161.55

Springer Rapid Thermal Processing of Semiconductors (Microdevices)

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Description

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Product Specifications

Format
paperback
Domain
Amazon UK
Publication Date
20 June 2013
Listed Since
07 November 2013

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