£174.24

Springer Rapid Thermal Processing of Semiconductors (Microdevices)

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Description

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Key Features

Used Book in Good Condition

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
31 May 1997
Listed Since
14 December 2006

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