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Elsevier Handbook of Thin Film Deposition Techniques 2nd Ed

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Description

The Handbook of Thin Film Deposition Techniques, Second Edition, explores the essential technology driving the silicon semiconductor industry and the ongoing trend of miniaturization. Published by Elsevier, this volume examines the advancements in thin film deposition methods and the specialized equipment required to support these processes. This second edition details the development of sophisticated, automatic tools designed to measure thickness and spacing at submicron dimensions. Readers gain insight into the principles, methods, and applications of PVD and other critical technologies. It serves as a comprehensive resource for understanding the growth of highly specialized equipment that enables modern semiconductor manufacturing and material processing.

Key Features

This second edition from Elsevier covers the principles and methods behind modern thin film deposition.

The text explores the specialized equipment and technology driving the silicon semiconductor industry.

Learn about the development of automatic tools capable of measuring submicron thickness and spacing.

The handbook provides detailed information on PVD and various deposition applications.

This volume addresses the technological trends in miniaturization observed over the last 20 years.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
01 February 2002
Listed Since
10 February 2007

Barcode

No barcode data available

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