£90.62

Nova Science Publishers Inc Borophosphosilicate Glass Thin Films in Electronics (Materials Science and Technologies: Electronics and Telecommunications Research)

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£142.99 £85.38 £97.95 £110.52 £123.09 £135.66 £148.23 09 June 2024 10 November 2024 14 April 2025 15 September 2025 17 February 2026

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289 days · current 178 days 152 days 0 72 145 217 289 £91-101 £101-112 £133-143 Days at Price

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Description

This comprehensive monograph summarises the 30-year studies of borophosphosilicate glass (BPSG) thin film used in electronic technologies, including the authors personal experience with the film deposition, characterisation, and implementation in microelectronic technology. The main core of the monograph is the interrelation of chemical vapour deposition (CVD) kinetic features, thin film material properties, and electronic device technology aspects. Part one of the monograph is devoted to the analysis of thin film synthesis, such as: CVD methodology and BPSG film processes, silicon dioxide and glass film growth kinetics, CVD step coverage and gap-fill features. Part two of the book is a description of BPSG film properties, film structure, glass flow capability, BPSG film-moisture interaction and the film defect formation phenomenon. A number of experimental data are presented and discussed in detail.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
01 July 2013
Listed Since
26 January 2013

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