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Academic Press PVD for Microelectronics Sputter Deposition

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Description

Part of the long-running Physics of Thin Films series by Academic Press, this volume focuses on PVD for microelectronics. Since 1963, this series has provided quality studies on the properties of various thin film materials and systems through 25 volumes. Starting with Volume 20, the series expanded beyond basic physics to address the most important aspects of both inorganic and organic thin films. This text covers both theoretical and technological aspects, making it a valuable resource for those studying semiconductor manufacturing and modern thin film science.

Key Features

This Academic Press book is part of the Physics of Thin Films series which has published 25 volumes since 1963.

The content covers important aspects of both inorganic and organic thin films for semiconductor manufacturing.

The text addresses both the theoretical and technological aspects of modern thin film science.

This volume focuses on sputter deposition and PVD processes specifically for microelectronics applications.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
06 August 2011
Listed Since
11 July 2011

Barcode

No barcode data available

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