£111.79

Academic Press - Optical Diagnostics for Thin Film Processing

Name: Academic Press - Optical Diagnostics for Thin Film Processing
Brand: Academic Press
Price: 111.79 GBP
Availability: InStock

Physical Chemistry

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Description

Explore the growing importance of in situ optical diagnostics in thin film processing through this comprehensive volume from Academic Press. This resource covers a wide range of applications, from fundamental science studies to process development and manufacturing control. A primary advantage highlighted is the noninvasive and nonintrusive nature of optical diagnostics. The text describes various optical probes used to monitor the surface, film, wafer, and gas above the wafer. It provides detailed coverage for several critical processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For every optical technique discussed, the book presents the underlying principles and modes of experimental implementation. This makes it a valuable reference for professionals and researchers looking to understand how optical methods can be used to monitor and control thin film production effectively.

Key Features

Covers in situ optical diagnostics for applications ranging from fundamental science to manufacturing control.

Focuses on noninvasive and nonintrusive methods for monitoring thin film processing.

Provides detailed descriptions of optical probes for surfaces, films, wafers, and gases.

Includes specific process coverage for plasma etching, MBE, MOCVD, and rapid thermal processing.

Explains the underlying principles and experimental implementation for each optical technique.

Product Specifications

Brand: Academic Press
Format: Hardcover
ASIN: 0123420709
Category: Books > Subjects > Science, Nature & Maths > Chemistry > Physical Chemistry
Domain: Amazon UK
Release Date: 27 October 1996
Listed Since: 06 February 2007

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Academic Press - Optical Diagnostics for Thin Film Processing

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