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Springer Dry Etching Technology for Semiconductors Book

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Description

This essential reference from Springer provides a comprehensive look at dry etching technology for semiconductors. Designed to help engineers develop new etching processes for the further miniaturization and integration of semiconductor integrated circuits, the text offers a practical guide for industry professionals and students. The book details the device manufacturing flow and identifies exactly where dry etching is utilized within that process. It is written specifically for those working at chip makers, equipment suppliers, and materials suppliers, as well as university students studying plasma. By focusing on the topics needed most, such as detailed etching processes for each material, this guide serves as a vital resource for advancing semiconductor technology.

Key Features

This Springer publication serves as a practical guide for engineers working at chip makers, equipment suppliers, and materials suppliers.

The text helps engineers develop new etching processes to support the miniaturization and integration of semiconductor integrated circuits.

Readers can learn about the device manufacturing flow and identify specific stages where dry etching is applied.

The content is tailored for university students studying plasma and focuses on the specific topics they need most.

The book provides detailed information regarding etching processes for various materials used in semiconductor manufacturing.

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