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£265 today · usual range £180–£266 · best ever £180

Springer Handbook of Advanced Plasma Processing Techniques

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£265.55 £171.45 £191.98 £212.51 £233.04 £253.57 £274.11 11 August 2026 02 September 2026 24 September 2026 16 October 2026 07 November 2026
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11 days 78 days · current 0 20 39 59 78 £180 £266 Days at Price

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Most common price: £266 (78 days, 87.6%)

Price range: £180 - £266

Price levels: 2 different prices over 89 days

Description

Explore the fundamental principles of plasma-based manufacturing in the Handbook of Advanced Plasma Processing Techniques by Springer. This technical reference covers essential methods such as dry etching and plasma-enhanced chemical vapor deposition, which serve as cornerstones for modern integrated circuit fabrication. Beyond semiconductor manufacturing, this text examines applications in surface-micromachined sensors, magnetic random access memory (MRAM), and read/write heads for data storage. It addresses the complex physics and chemistry of plasmas and their interactions with semiconductors and other materials. This resource provides the necessary technical depth for understanding processes that are often overlooked during the manufacturing stage, making it a valuable addition to any technical library focused on advanced material processing.

Key Features

This Springer handbook covers cornerstone techniques for modern integrated circuit fabrication, including dry etching and plasma-enhanced chemical vapor deposition.

The text examines practical applications for surface-micromachined sensors and read/write heads used in data storage.

Detailed information is provided regarding the use of plasma techniques in magnetic random access memory (MRAM) development.

The content addresses the complex chemistry and physics of plasmas and how they interact with semiconductors and other materials.

This technical reference explores advanced plasma processing methods that are frequently overlooked during the manufacturing stage.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
01 November 2012
Listed Since
22 April 2014

Barcode

No barcode data available

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