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£113.09
Springer - Dry Etching for VLSI - Applied Physics Book
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Description
Key Features
Focused subject matter regarding dry (plasma) etching applications in silicon semiconductor processing.
Part of a professional scientific series published by Plenum Press to review specific technical topics.
Includes reprinted abstracts of major references to help you find in-depth material quickly.
Reduces the need to search through multiple additional publications for research support.
4036834090043
Product Specifications
- Brand
- Springer
- Format
- paperback
- ASIN
- 1489925686
- Domain
- Amazon UK
- Publication Date
- 29 May 2013
- Listed Since
- 07 November 2013
Barcode
No barcode data available
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