£213.13

Springer Plasma Processing of Semiconductors: 336 (NATO Science Series E:, 336)

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£213.13 £200.98 £203.63 £206.28 £208.93 £211.58 £214.23 09 June 2024 04 November 2024 02 April 2025 29 August 2025 25 January 2026

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Description

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Product Specifications

Format
paperback
Domain
Amazon UK
Publication Date
12 October 2012
Listed Since
07 November 2013

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