Plasma Processing of Semiconductors: 336 (NATO Science Series E:, 336) - Image 1

£213.13

Springer Plasma Processing of Semiconductors: 336 (NATO Science Series E:, 336)

Name: Plasma Processing of Semiconductors: 336 (NATO Science Series E:, 336)
Brand: Springer
Price: 213.13 GBP
Availability: InStock

Electrical Engineering

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Description

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.

Product Specifications

Brand: Springer
Format: paperback
ASIN: 9401064865
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electrical > Electrical Engineering
Domain: Amazon UK
Publication Date: 12 October 2012
Listed Since: 07 November 2013

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Springer Plasma Processing of Semiconductors: 336 (NATO Science Series E:, 336)

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