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William Andrew Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions (Materials Science and Process Technology Series): ... Science and Process Technology Series)

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Description

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
01 December 1989
Listed Since
16 February 2007

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