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Wiley Glow Discharge Processes: Sputtering and Plasma Etching

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Description
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Product Specifications
Brand
Wiley
Format
hardcover
ASIN
047107828X
Category
Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electrical > Electromagnetic Theory
Domain
Amazon UK
Release Date
05 November 1980
Listed Since
09 February 2007

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No barcode data available

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