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Springer Handbook of Advanced Plasma Processing Techniques

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£303.31 £286.36 £290.06 £293.76 £297.45 £301.15 £304.85 11 August 2026 02 September 2026 24 September 2026 16 October 2026 07 November 2026
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Price range: £288 - £303

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Description

Explore the fundamental principles of modern integrated circuit fabrication with the Handbook of Advanced Plasma Processing Techniques from Springer. This technical resource covers essential methods such as pattern transfer through dry etching and plasma-enhanced chemical vapor deposition. Beyond standard circuit fabrication, this text addresses the application of these techniques to surface-micromachined sensors, magnetic random access memory (MRAM), and read/write heads for data storage. The book provides a detailed look at the complex physics and chemistry of plasmas and how they interact with the surfaces of semiconductors and other materials. It is designed to address the technical aspects of plasma interactions that are often overlooked during the manufacturing stage.

Key Features

This Springer publication covers cornerstone techniques for integrated circuit fabrication like dry etching and plasma-enhanced chemical vapor deposition.

The text explores applications for surface-micromachined sensors and magnetic random access memory (MRAM).

It provides technical insights into the chemistry and physics of plasmas and their interactions with semiconductor surfaces.

The content addresses critical plasma interaction details that are often overlooked during the manufacturing process.

This handbook includes information relevant to the development of read/write heads for data storage.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
28 August 2000
Listed Since
16 December 2006

Barcode

No barcode data available

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