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£94.58
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£95 today · previous high £95 · all-time low £94
SPIE Press Optical Lithography for Semiconductor Patterning
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Last 43 days · 43 data points (no recent data)
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Price distribution over 43 days • 1 price levels
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Most common price: £95 (43 days, 100.0%)
Price range: £95 - £95
Price levels: 1 different prices over 43 days
Description
Key Features
This SPIE Press monograph covers modern lithography developments from the first half of the 2020s.
The text provides a detailed account of high-NA extreme-ultraviolet lithography (EUVL) introduction.
Readers gain a comprehensive description of the effects impacting optical image quality inside the resist layer.
The material is structured for those with a graduate-level background in physics, chemistry, or mathematics.
The book tracks how lithography tool generations have increased the complexity of patterning processes.
Product Specifications
- Brand
- SPIE Press
- Format
- hardcover
- ASIN
- 1510680330
- Category
- Books > Subjects > Science, Nature & Maths > Engineering & Technology > Engineering Physics
- Domain
- Amazon UK
- Release Date
- 31 March 2025
- Listed Since
- 24 March 2025
Barcode
No barcode data available
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