£238.63

CRC Press Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering)

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Description

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
25 June 1998
Listed Since
10 February 2007

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