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CRC Press Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering)

Name: Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering)
Brand: CRC Press

Industrial Design

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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

Product Specifications

Brand: CRC Press
Format: hardcover
ASIN: 0824799518
Category: Books > Subjects > Arts & Photography > Decorative Arts & Design > Industrial Design
Domain: Amazon UK
Release Date: 25 June 1998
Listed Since: 10 February 2007

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CRC Press Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering)

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