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Wiley Resolution Enhancement Techniques in Optical Lithography

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£135.00 £128.25 £130.95 £133.65 £136.35 £139.05 £141.75 28 July 2026 17 August 2026 06 September 2026 26 September 2026 17 October 2026
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Description

Explore the evolution of optical lithography for integrated circuits with this specialized volume from the Spie Milestone Series. As the industry adopts Resolution Enhancement Technology (RET), many of these concepts have transitioned from experimental ideas to routine manufacturing standards. This book provides a comprehensive collection of seminal RET papers, offering deep insight into the technological shifts driving modern semiconductor fabrication. Published by SPIE Press and distributed by Wiley, this text serves as a vital resource for professionals and students studying applied optics and electronics engineering.

Key Features

This Spie Milestone Series volume focuses on the adoption of Resolution Enhancement Technology (RET) in optical lithography.

The text gathers seminal RET papers to document the development of techniques used in integrated circuit manufacturing.

It covers concepts that have become routine in the production of modern integrated circuits.

This book is published by SPIE Press and serves as a technical resource for electronics and communications engineering.

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