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£135.00
Wiley Resolution Enhancement Techniques in Optical Lithography - SPIE
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Description
Key Features
Gathers seminal RET papers in one comprehensive volume for professional study.
Covers key Resolution Enhancement Technology concepts used in modern manufacturing.
Provides deep insight into the renaissance of optical lithography for integrated circuits.
Serves as a technical resource for electronics and communications engineering professionals.
Part of the respected SPIE Milestone Series for applied optics and engineering.
Product Specifications
- Brand
- Wiley
- Format
- hardcover
- ASIN
- 0819451665
- Domain
- Amazon UK
- Release Date
- 28 February 2004
- Listed Since
- 04 January 2007
Barcode
No barcode data available
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