Optical Lithography: Here is Why (Press Monograph) - Image 1

£97.95

Wiley Optical Lithography: Here is Why (Press Monograph)

Name: Optical Lithography: Here is Why (Press Monograph)
Brand: Wiley
Price: 97.95 GBP
Availability: InStock

Applied Optics

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Description

This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Readers will also get a primer on the outlook of optical lithography and the many next-generation technologies that may greatly enhance semiconductor manufacturing in the near future. Topics covered in this title include: Exposure Systems; Image Formation; The Meter of Lithography; Components in Optical Lithography; Processing and Optimization; Immersion Lithography; and, Outlook for optical lithography. Burn Lin is editor-in-chief of the ""Journal of Micro/Nanolithography"", MEMS, and MOEMS, past chair of the ""SPIE Advanced Lithography"" symposium, author of two book chapters and over 75 articles, and holder of 37 U.S. patents.

Product Specifications

Brand: Wiley
Format: hardcover
ASIN: 0819475602
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electronics & Communications Engineering > Electronics Engineering > Applied Optics
Domain: Amazon UK
Release Date: 15 September 2009
Listed Since: 19 February 2009

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Wiley Optical Lithography: Here is Why (Press Monograph)

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