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£78.74
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£79 today · cheaper than every other day in the last 3 months
Chemistry and Lithography, Vol. 2: Chemistry in Lithography
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Most common price: £79 (46 days, 100.0%)
Price range: £79 - £79
Price levels: 1 different prices over 46 days
Description
Key Features
This SPIE Press monograph provides a detailed exploration of the chemical basis of lithography.
The content is organized into five parts covering process, materials, photo- and radiation chemistry, imaging mechanisms, and process-induced chemistry.
The text deconstructs lithography into its essential chemical principles to situate aspects in specific chemistry fields.
The volume addresses patterning challenges relevant to 10-nm and 7-nm technology nodes and EUV lithography implementation.
Product Specifications
- Format
- paperback
- ASIN
- 1510655573
- Domain
- Amazon UK
- Release Date
- 01 September 2023
- Listed Since
- 28 July 2023
Barcode
No barcode data available
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