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£114.71
Springer Semiconductor Lithography - Principles and Practices
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Most common price: £115 (38 days, 100.0%)
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Description
Key Features
Covers the fundamental principles of semiconductor lithography used in the manufacturing of integrated silicon-based circuits.
Explains how lithography patterns microscopic circuits through wet processes to complement hot processes like vacuum film deposition.
Provides technical insight into the use of resist material for drawing and printing integrated circuit patterns.
Details the complex overlay process where patterns are applied to previous circuit layers up to 30 times.
Includes information on patterning essential semiconductor steps such as oxidations and dopant implantation.
Product Specifications
- Brand
- Springer
- Format
- paperback
- ASIN
- 1461282284
- Domain
- Amazon UK
- Release Date
- 22 February 2012
- Listed Since
- 20 September 2013
Barcode
No barcode data available
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