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Springer Semiconductor Lithography: Principles, Practices, Materials

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Description

Semiconductor Lithography: Principles, Practices, and Materials is a comprehensive guide to one of the most critical processes in integrated circuit manufacturing. This Springer publication explores the fundamental principles and practical applications of lithography, the essential technique for patterning microscopic circuits onto silicon wafers. The book covers the complete lithography workflow, from resist material selection through the wet and dry processes that define device features, including vacuum film deposition, oxidation, and dopant implantation steps. Whether you are an engineering student, semiconductor manufacturing professional, or materials scientist, this text provides the technical depth needed to understand how lithography transforms raw silicon into functional transistors and complex integrated circuits. The Microdevices series positioning ensures content aligns with current industry standards and emerging technologies in semiconductor fabrication.

Key Features

Covers semiconductor lithography principles and manufacturing processes essential for integrated circuit fabrication.

Explains resist materials, pattern formation, and overlay techniques used in modern semiconductor production.

Details wet and dry lithography processes including vacuum deposition, oxidation, and dopant implantation methods.

Published by Springer as part of the Microdevices series for technical credibility and current industry relevance.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
22 February 2012
Listed Since
20 September 2013

Barcode

No barcode data available

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