Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon (Materials and Processing Technology) - Image 1

Price loading...

CRC Press Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon (Materials and Processing Technology)

Name: Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon (Materials and Processing Technology)
Brand: CRC Press

Architecture & Microprocessors

Price History & Forecast

No Price Data Available

Price history will appear here once data is collected from Amazon.

Price Distribution

No price data available for histogram

Description

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Product Specifications

Brand: CRC Press
Format: hardcover
ASIN: 0815514425
Category: Books > Subjects > Computing & Internet > Computer Science > Architecture & Microprocessors
Domain: Amazon UK
Release Date: 01 February 2002
Listed Since: 10 February 2007

Barcode

No barcode data available

CRC Press Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon (Materials and Processing Technology)

Price History & Forecast

No Price Data Available

Price Distribution

Description

Product Specifications

Barcode

Similar Products You Might Like

Engineering Thin Films and Nanostructures with Ion Beams: 95 (Optical Science and Engineering)

Handbook of Chemical Vapor Deposition (Materials Science and Process Technology Series): Principles, Technology, and Applications (Materials Science and Process Technology Series)

THIN FILM CHEMICAL VAPOR DEPOSITION IN: Equipment, Methodology and Thin Film Growth Experience (Materials Science and Technologies)

Fundamentals of Electrochemical Deposition, 2nd Edition (The ECS Series of Texts and Monographs)

Handbook of Semiconductor Manufacturing Technology

Heteroepitaxy of Semiconductors: Theory, Growth, and Characterization, Second Edition

Coatings Technology Handbook

The Science and Engineering of Microelectronic Fabrication, 2nd Ed.

Handbook of Semiconductor Interconnection Technology

Simple Chemical Methods for Thin Film Deposition: Synthesis and Applications

Handbook of Sputtering Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

Handbook of Crystal Growth: Thin Films and Epitaxy: Volume 3A-3B (Handbook of Crystal Growth, Volume 3A-3B)

Advanced Silicon & Semiconducting Silicon-Alloy Based Materials & Devices

Handbook of Silicon Wafer Cleaning Technology, 2nd Edition

Handbook of Silicon Wafer Cleaning Technology (Materials Science and Process Technology)

Thin Films Material Technology: Sputtering of Compound Materials

Plasma Electronics: Applications in Microelectronic Device Fabrication

Handbook of Thin Film Technology

Handbook of Silicon Based MEMS Materials and Technologies (Micro & Nano Technologies) (Micro and Nano Technologies)

Molecular Beam Epitaxy: From Research to Mass Production

CRC Press Microelectronics (Electronics Handbook Series) Book

Thin Films & Coatings: New Research

Handbook of Photomask Manufacturing Technology

Optical Thin Films and Coatings: From Materials to Applications (Woodhead Publishing Series in Electronic and Optical Materials)