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£107.98
Springer - Modelling of Microfabrication Systems Book
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Description
Key Features
Focuses on the modeling of systems used to create three-dimensional microstructures.
Provides detailed coverage of high aspect ratio microtechnology processes.
Includes technical information on ion beam micromachining methods.
Covers x-ray lithography as a key aspect of microfabrication systems.
Published by Springer, a recognized name in technical and scientific literature.
Product Specifications
- Brand
- Springer
- Format
- paperback
- ASIN
- 3642055362
- Domain
- Amazon UK
- Release Date
- 08 December 2010
- Listed Since
- 20 September 2010
Barcode
No barcode data available
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