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Springer Modelling of Microfabrication Systems - Microtechnology MEMS Book

Amazon

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Description

This comprehensive guide by Springer is the first book to address modelling of systems essential to fabricating three-dimensional microstructures. It uniquely focuses on high aspect ratio microtechnology, covering techniques from ion beam micromachining to x-ray lithography. Designed for engineers, researchers, and students working in microtechnology and MEMS fields, this resource provides in-depth analysis of microfabrication processes and system modelling approaches that are critical for developing precise microstructures. Whether you are developing microdevices, studying advanced manufacturing techniques, or implementing microtechnology solutions, this book offers the technical foundation and practical insights needed to understand and optimise fabrication systems.

Key Features

Springer publication dedicated to modelling systems for three-dimensional microstructure fabrication in microtechnology.

Covers high aspect ratio microtechnology techniques including ion beam micromachining and x-ray lithography methods.

Provides comprehensive technical analysis for engineers and researchers working with MEMS and microfabrication systems.

Addresses system modelling approaches essential for optimising microstructure production and fabrication processes.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
08 December 2010
Listed Since
20 September 2010

Barcode

No barcode data available

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