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£62.61

Springer Micro and Nano Fabrication: Tools and Processes

Name: Micro and Nano Fabrication: Tools and Processes
Brand: Springer
Price: 62.28 GBP
Availability: InStock

Nanotechnology

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Description

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Product Specifications

Brand: Springer
Format: paperback
ASIN: 3662508265
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electrical > Nanotechnology
Domain: Amazon UK
Release Date: 06 October 2016
Listed Since: 29 September 2016

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Springer Micro and Nano Fabrication: Tools and Processes

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