£106.91

Springer Micro and Nano Fabrication: Tools and Processes

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Last 81 days · 81 data points (no recent data)

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£107.99 £106.80 £107.06 £107.32 £107.58 £107.84 £108.10 25 April 2026 15 May 2026 04 June 2026 24 June 2026 14 July 2026

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Price distribution over 81 days • 2 price levels

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65 days · current 16 days 0 16 33 49 65 £107 £108 Days at Price

Price Analysis

Most common price: £107 (65 days, 80.2%)

Price range: £107 - £108

Price levels: 2 different prices over 81 days

Description
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Product Specifications
Brand
Springer
Format
hardcover
ASIN
3662443945
Category
Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electrical > Nanotechnology
Domain
Amazon UK
Release Date
20 January 2015
Listed Since
12 July 2014

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