£107.99

Springer Micro and Nano Fabrication: Tools and Processes

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£107.99 £77.19 £83.91 £90.63 £97.35 £104.07 £110.79 25 January 2026 13 February 2026 04 March 2026 23 March 2026 12 April 2026

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76 days 2 days · current 0 19 38 57 76 £80 £108 Days at Price

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Description

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Product Specifications

Format
Hardcover
Domain
Amazon UK
Release Date
20 January 2015
Listed Since
12 July 2014

Barcode

No barcode data available

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