£140.00

Handbook of Microlithography, Micromachining, and Microfabrication

Electronics Engineering

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Description

This two-volume resource serves as a comprehensive compilation of diverse information for researchers and engineers. As the industry moves toward etching features smaller than 0.13 microns, this handbook addresses the necessary shift away from visible light alternatives. Volume Two provides a deep look into process technology and device applications. This text is designed for those working in electronics and communications engineering who require a centralized reference for microfabrication methods. By gathering essential data into a single resource, it helps professionals navigate the complexities of modern microtechnology and the evolving requirements of sub-0.13 micron feature etching.

Key Features

Comprehensive two-volume resource that compiles diverse technical information into one centralized location for researchers.

Focuses on process technology and device applications within Volume Two to support practical engineering needs.

Addresses the transition to alternatives to visible light required for etching features smaller than 0.13 microns.

Designed specifically for professionals in electronics and communications engineering fields.

Provides essential data for those navigating the technical requirements of modern microfabrication.

Product Specifications

Format: Paperback
ASIN: 0819423793
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electronics & Communications Engineering > Electronics Engineering
Domain: Amazon UK
Release Date: 31 December 1997
Listed Since: 16 February 2007

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Handbook of Microlithography, Micromachining, and Microfabrication

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