Surface Metrology for Micro- and Nanofabrication (Micro and Nano Technologies) - Image 1

£141.19

Elsevier Surface Metrology for Micro- and Nanofabrication (Micro and Nano Technologies)

Name: Surface Metrology for Micro- and Nanofabrication (Micro and Nano Technologies)
Brand: Elsevier
Price: 141.19 GBP
Availability: InStock

Materials Science

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Description

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Product Specifications

Brand: Elsevier
Format: paperback
ASIN: 0128178507
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Mechanical & Materials Engineering > Materials Science
Domain: Amazon UK
Release Date: 02 November 2020
Listed Since: 01 October 2019

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Elsevier Surface Metrology for Micro- and Nanofabrication (Micro and Nano Technologies)

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