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LAP Lambert Academic Publishing Plasma-Assisted Atomic Layer Deposition of III-Nitride Thin Films: Growth and Characterization

Name: Plasma-Assisted Atomic Layer Deposition of III-Nitride Thin Films: Growth and Characterization
Brand: LAP Lambert Academic Publishing
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Description

III-nitride compound semiconductors (AlN, GaN, InN) and their alloys have emerged as versatile and high-performance materials for a wide range of electronic and optoelectronic device applications. Although high quality III-nitride thin films can be grown at high temperatures (>1000 °C) with significant rates, deposition of these films on temperature-sensitive device layers and substrates necessitates the adaptation of low-temperature methods such as atomic layer deposition (ALD). When compared to other low-temperature thin film deposition techniques, ALD stands out with its self-limiting growth mechanism, which enables the deposition of highly uniform and conformal thin films with sub-angstrom thickness control. These unique characteristics make ALD a powerful method especially for depositing films on nanostructured templates, as well as preparing alloy thin films with well-defined compositions. This monograph reports on the development of low-temperature (≤200 °C) plasma-assisted ALD processes for III-nitrides, and presents detailed characterization results for the deposited thin films and fabricated nanostructures.

Product Specifications

Brand: LAP Lambert Academic Publishing
Format: paperback
ASIN: 365920823X
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology
Domain: Amazon UK
Publication Date: 17 March 2014
Listed Since: 14 April 2014

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LAP Lambert Academic Publishing Plasma-Assisted Atomic Layer Deposition of III-Nitride Thin Films: Growth and Characterization

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It has never been this cheap. We have no record of a lower price.

LAP Lambert Academic Publishing Plasma-Assisted Atomic Layer Deposition of III-Nitride Thin Films: Growth and Characterization

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