Functional thin films produced by plasma techniques: Study of titanium nitride and aluminum nitride functional films deposited on AISI M2 and AISI D6 substrates

Filmes finos funcionais produzidos por técnicas de plasma: Estudo de filmes funcionais de nitreto de titânio e de nitreto de alumínio depositados em substratos AISI M2 e AISI D6

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