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CRC Press High k Gate Dielectrics (Materials Science and Engineering (Hardcover))

Name: High k Gate Dielectrics (Materials Science and Engineering (Hardcover))
Brand: CRC Press

Electrical Engineering

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The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be required, making this is a subject of intensive research activity within the microelectronics community. High k Gate Dielectrics reviews the state-of-the-art in high permittivity gate dielectric research. Consisting of contributions from leading researchers from Europe and the USA, the book first describes the various deposition techniques used for construction of layers at these dimensions. It then considers characterization techniques of the physical, chemical, structural, and electronic properties of these materials. The book also reviews the theoretical work done in the field and concludes with technological applications.

Product Specifications

Brand: CRC Press
Format: hardcover
ASIN: 0750309067
Category: Books > Subjects > Science, Nature & Maths > Engineering & Technology > Electrical > Electrical Engineering
Domain: Amazon UK
Release Date: 01 December 2003
Listed Since: 14 February 2007

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CRC Press High k Gate Dielectrics (Materials Science and Engineering (Hardcover))

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