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£120.69
Springer - Fundamental Aspects of Ultrathin Dielectrics on Si
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£121 today · all-time low £121 (Jun 2026) · usually the usual
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Description
Key Features
Provides a technical review of scientific issues related to ultrathin dielectrics at the nano and atomic scale.
Examines the critical 1-3 nm regime for silicon oxide, oxynitride, and high K materials on silicon systems.
Addresses the requirements for next-generation Si-based devices as ULSI scaling trends continue to evolve.
Covers essential research topics for gate thicknesses below 3 nm and feature sizes below 0.1 mu.
Part of the NATO Science Partnership Subseries (Volume 3, 47) for academic and professional reference.
Product Specifications
- Brand
- Springer
- Format
- paperback
- ASIN
- 0792350081
- Domain
- Amazon UK
- Release Date
- 31 March 1998
- Listed Since
- 09 December 2006
Barcode
No barcode data available
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