Concepts of Silicon Surface Micromachining [DVD]

Dr. Bernhard Jokiel, Jr. - Senior Member of Technical Staff, Sandia National Laboratories. This is an introduction to silicon surface micromachining (SSM) as a method for creating micro-electrical mechanical (MEMS) devices. Viewers will be introduced to the basics of processing SSM devices using Sandia National Laboratory's SUMMiT-V (TM) process including design tools and methodology. Real-world applications for MEMS devices will be presented including on-chip spatial motion control as well as an overview of other commercialized MEMS products and technologies. The viewer will walk away with a clearer view of MEMS technology and a raised awareness of the convergence of macro, meso, micro, and nano fabrication technologies. Several video clips and animations show how these devices create and control motions.