£110.00

MEMS and MOEMS Technology and Applications: v. PM85 (Spie Press Monograph)

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£110.00 £78.72 £85.54 £92.37 £99.19 £106.02 £112.84 23 May 2024 28 October 2024 05 April 2025 11 September 2025 17 February 2026

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Description

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
31 July 2000
Listed Since
16 February 2007

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