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£120.99
Elsevier Micro Mechanical Systems - Principles and Technology
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Description
Key Features
Comprehensive overview of the historical background and the development of microsystems from microcomponents.
Detailed coverage of photolithographic microfabrication, including planar processing and material science.
In-depth examination of micromachining by machine tools, including history and preparation methods.
Exploration of microphysics and design principles necessary for modern microsystem engineering.
Structured learning through ten distinct sections covering various aspects of microscale technology.
Part of the professional Handbook of Sensors and Actuators series by Elsevier Science.
Product Specifications
- Brand
- Elsevier
- Format
- hardcover
- ASIN
- 0444823638
- Domain
- Amazon UK
- Release Date
- 28 July 1998
- Listed Since
- 06 February 2007
Barcode
No barcode data available
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