£120.99

Elsevier Micro Mechanical Systems - Principles and Technology

Name: Elsevier Micro Mechanical Systems - Principles and Technology
Brand: Elsevier
Price: 120.99 GBP
Availability: InStock

Physical Chemistry

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Description

Explore the fundamental principles and technological advancements of Micro Mechanical Systems with this comprehensive volume from Elsevier. As part of the Handbook of Sensors and Actuators series, this book provides a structured deep dive into the evolution of microsystems, tracing their development from microcomponents to complex integrated systems. Readers gain a thorough understanding of the historical background and the relationship between microsystems and microelectronics. The text covers essential technical areas including microphysics, design, and the motivation behind modern microsystem development. It serves as a detailed resource for understanding how these systems function and how they are built. This volume is organized into clear sections to guide learners through complex topics. You will find detailed information on photolithographic microfabrication, planar processing concepts, and various materials and processes used in the field. Additionally, the book examines micromachining by machine tools, covering its history, basic principles, and necessary preparation methods. This text is a valuable resource for those studying physical chemistry and the engineering of microscale technologies.

Key Features

Comprehensive overview of the historical background and the development of microsystems from microcomponents.

Detailed coverage of photolithographic microfabrication, including planar processing and material science.

In-depth examination of micromachining by machine tools, including history and preparation methods.

Exploration of microphysics and design principles necessary for modern microsystem engineering.

Structured learning through ten distinct sections covering various aspects of microscale technology.

Part of the professional Handbook of Sensors and Actuators series by Elsevier Science.

Product Specifications

Brand: Elsevier
Format: hardcover
ASIN: 0444823638
Category: Books > Subjects > Science, Nature & Maths > Chemistry > Physical Chemistry
Domain: Amazon UK
Release Date: 28 July 1998
Listed Since: 06 February 2007

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Elsevier Micro Mechanical Systems - Principles and Technology

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