Elsevier Micro Mechanical Systems - Principles and Technology

Explore the fundamental principles and technological advancements of Micro Mechanical Systems with this comprehensive volume from Elsevier. As part of the Handbook of Sensors and Actuators series, this book provides a structured deep dive into the evolution of microsystems, tracing their development from microcomponents to complex integrated systems. Readers gain a thorough understanding of the historical background and the relationship between microsystems and microelectronics. The text covers essential technical areas including microphysics, design, and the motivation behind modern microsystem development. It serves as a detailed resource for understanding how these systems function and how they are built. This volume is organized into clear sections to guide learners through complex topics. You will find detailed information on photolithographic microfabrication, planar processing concepts, and various materials and processes used in the field. Additionally, the book examines micromachining by machine tools, covering its history, basic principles, and necessary preparation methods. This text is a valuable resource for those studying physical chemistry and the engineering of microscale technologies.