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Elsevier Micro Mechanical Systems Principles and Technology

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Description

Explore the fundamental principles and technology of Micro Mechanical Systems with this comprehensive volume from the Handbook of Sensors and Actuators series. Published by Elsevier, this text provides a detailed technical overview organized into ten distinct sections for academic and professional study. The content begins with a historical introduction to microsystems, discussing microphysics, design, and the evolution from microcomponents to full microsystems. Readers can examine the parallels between these systems and microelectronics to understand the motivation behind modern microsystem development. Technical deep dives include photolithographic microfabrication, covering planar processing, materials, and basic concepts. The book also addresses micromachining by machine tools, detailing its history, basic principles, and preparation methods. This volume serves as a specialized resource for those studying physical chemistry and microfabrication processes.

Key Features

This Elsevier publication serves as Volume 6 of the Handbook of Sensors and Actuators series.

The text provides a detailed historical background and discusses the evolution from microcomponents to microsystems.

Technical sections cover photolithographic microfabrication, including planar processing and materials.

Included content examines micromachining by machine tools and its specific preparation methods.

The book explores the relationship between microphysics and the design of micro mechanical systems.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
28 July 1998
Listed Since
06 February 2007

Barcode

No barcode data available

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