Wiley Micromechanics MEMS Papers to 1990: Classic and Seminal Papers to 1990

Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, electronic interfaces to physical phenomena, military, industrial controls, consumer products, airplanes, microsatellites, and much more. Until now, papers written during the earlier stages of this field have been difficult to retrieve. The papers included in this volume have been thoughtfully arranged by topic, and are accompanied by section introductions written by renowned expert William Trimmer. From the Inside Flap Electrical Engineering Micromechanics and MEMS Classic and Seminal Papers to 1990 Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, consumer products, genetic engineering, aerospace and microsatellites, communication, the military, data storage, games and toys, food preparation, chemical processing, sensors, and microactuators. In fact, most fields will find uses for micromechanics in the next ten years. Micromechanics and MEMS gives you convenient access to the fundamental papers in this rapidly growing field. Until now, papers written during the earlier stages of this field have been difficult to retrieve. Micromechanics and MEMS presents seminal papers in micromechanics, up to and including papers written in 1990. This volume gives you an historical perspective of the field and insight into where the field is heading. The papers are arranged by topic, with an introduction to each section written by expert and editor, William Trimmer. Topics covered include: Side drive, comb drive, electrostatic, magnetic, and harmonic actuators Valves and pumps Fluidics Surface and bulk micromachining LIGA Computer-aided design Metrology From the Back Cover Electrical Engineering Micromechanics and MEMS Classic and Seminal Papers to 1990 Micromechanics is a rich, diverse field that draws on many different disciplines and has potential applications in medicine, consumer products, genetic engineering, aerospace and microsatellites, communication, the military, data storage, games and toys, food preparation, chemical processing, sensors, and microactuators. In fact, most fields will find uses for micromechanics in the next ten years. Micromechanics and MEMS gives you convenient access to the fundamental papers in this rapidly growing field. Until now, papers written during the earlier stages of this field have been difficult to retrieve. Micromechanics and MEMS presents seminal papers in micromechanics, up to and including papers written in 1990. This volume gives you an historical perspective of the field and insight into where the field is heading. The papers are arranged by topic, with an introduction to each section written by expert and editor, William Trimmer. Topics covered include: Side drive, comb drive, electrostatic, magnetic, and harmonic actuators Valves and pumps Fluidics Surface and bulk micromachining LIGA Computer-aided design Metrology About the Author About the Editor William S. Trimmer has been working in micromechanics since 1985. He is currently with Belle Mead Research, Inc. Dr. Trimmer co-organized the first workshop in the MEMS series, "Micro Robots and Teleoperators Workshop;" co-organized the National Science Foundation (NSF) workshop on Microelectromechanical Systems Research; co-edited the NSF report "Small Machines, Large Opportunities: A Report on the Emerging Field of Microdynamics;" edited a special section of the Sensors and Actuators Journal; and started the "Micromechanics" section in the Sensors and Actuators Journal. He organized the first joint IEEE/ASME journal, The Journal of Microelectromechanical Systems, and was the editor for the first six years.