£105.14

Springer Bonding in Microsystem Technology: 24 (Springer Series in Advanced Microelectronics, 24)

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Description

This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
25 November 2010
Listed Since
01 October 2010

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