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OmniScriptum Etude du problème inverse en scatterométrie: Application de la scatterométrie spectroscopique à la métrologie dimensionnelle en microélectronique (Omn.Univ.Europ.)

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Description

La scatterométrie est une méthode de mesure non destructive basée sur la mesure et l'interprétation des phénomènes de diffraction des structures périodiques. Le traitement des données et l'extraction des paramètres géométriques des structures étudiées constituent le problème inverse à résoudre. L'utilisation d'algorithmes de minimisation locale permet d'effectuer l'ajustement des données expérimentales sous certaines hypothèses statistiques. L'ensemble des études théoriques et expérimentales a mis en évidence que la scatterométrie permet de mesurer les profiles de réseaux mono- et bi-périodiques compatibles avec les spécifications des futures circuits intégrés. Néanmoins, seuls certains paramètres géométriques de la structure diffractantes sont susceptibles d'être mesurés dans des conditions expérimentales standard. Cette méthode de mesure apparaît aussi être robuste vis-à-vis des défauts et des inhomogénéités du réseau et est bien corréléé avec les méthodes de mesure couramment utilisées dans en microélectronique (MEB, AFM). On peut noter que la précision des indices optiques des matériaux constitue l'une des clés de la fiabilité de la mesure.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
13 August 2010
Listed Since
16 August 2010

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