£66.00

VDM Verlag Photostrom-Spektroskopie von Silicium: Charakterisierung von Eisen kontaminiertem Silicium und Isolator/Silicium-Strukturen mit dem Elymat-Verfahren

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£66.00 £62.70 £64.02 £65.34 £66.66 £67.98 £69.30 14 June 2026 02 July 2026 20 July 2026 07 August 2026 26 August 2026

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Description

Das vorliegende Buch dokumentiert umfassende experimentelle und theoretische Untersuchungen zur Injektionsabhängigkeit von Photostrom-Messungen. Die Injektionsabhängigkeit der Ladungsträgerlebensdauer von Eisen-kontaminierten bordotierten Siliciumproben wurde mit dem konventionellen Elymat-Verfahren experimentell ermittelt und durch zweidimensionale Simulationen verifiziert. Die dabei gewonnenen Ergebnisse sind von grundlegender Bedeutung für die ebenfalls erfolgte Charakterisierung von Isolator/Silicium-Strukturen mit einem modifizierten Elymat-Verfahren. Erstmals ist es mit dieser Messmethode gelungen, die Grenzflächenzustandsdichte und die Isolatorvolumenladung quantitativ zu bestimmen.Das Buch richtet sich an Ingenieure und Physiker aus dem Gebiet der Halbleiterphysik und -messtechnik.

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