£74.73

Springer Fundamental Aspects of Silicon Oxidation: 46 (Springer Series in Materials Science, 46)

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Description

This book deals with an important basic technology in microelectronics. It discusses silicon oxidation in a tutorial fashion from both experimental and theoretical viewpoints. The authors report on the state of the art both at Lucent Technology and in academic research. The book will appeal to researchers and advanced students.

Product Specifications

Format
paperback
Domain
Amazon UK
Publication Date
05 October 2012
Listed Since
03 March 2013

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