£158.16

Springer Ion Sources

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Description

This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
03 December 2010
Listed Since
01 October 2010

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