£162.57

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£163 today · usual range £135–£163 · best ever £135

Springer Principles of Chemical Vapor Deposition - Springer

Amazon

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£162.58 £132.55 £139.10 £145.65 £152.21 £158.76 £165.31 11 August 2026 16 August 2026 22 August 2026 27 August 2026 02 September 2026
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Description

Principles of Chemical Vapor Deposition by Springer offers a practical introduction to the fundamental science behind CVD processes, covering heat and mass transfer, surface chemistry, gas phase reactions, and plasma discharge characteristics. This comprehensive guide bridges theory and application by discussing practical film deposition and reactor design, making it an invaluable resource for professionals and researchers entering the field of chemical vapor deposition. Whether you are developing new CVD processes, optimising equipment performance, or seeking to better understand published research, this book provides the foundational knowledge needed to navigate CVD reactor design, process control, and technical literature. Suitable for engineers, scientists, and technicians working in semiconductor manufacturing, materials science, and advanced coating applications.

Key Features

Covers essential CVD fundamentals including heat and mass transfer principles applicable to reactor design and process optimisation.

Explains surface chemistry and gas phase reactions critical to understanding film deposition mechanisms in chemical vapor deposition systems.

Discusses plasma discharge characteristics relevant to plasma-enhanced CVD processes and equipment selection.

Includes practical reactor and film examples to support the development of improved CVD processes and equipment solutions.

Designed to help CVD practitioners comprehend technical literature and research in the chemical vapor deposition field.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
01 December 2010
Listed Since
14 June 2010

Barcode

No barcode data available

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