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£109.17
Springer - Micromachined Thin-Film Sensors for SOI-CMOS
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Description
Key Features
Co-integration strategies for combining sensors and electronics on a single silicon chip for better performance.
Detailed analysis of gas-flow sensors integrated on dielectric membranes using CMOS-SOI technology.
Technical guidance on achieving miniaturization and process simplicity in semiconductor manufacturing.
In-depth investigation into the extraction of residual stress in thin layers and stacking processes.
Practical insights into maintaining cost-efficiency while improving device reliability and scale.
Product Specifications
- Brand
- Springer
- Format
- paperback
- ASIN
- 1441939571
- Domain
- Amazon UK
- Release Date
- 29 October 2010
- Listed Since
- 06 July 2010
Barcode
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