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£109.20
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£109 today · cheaper than every other day in the last 3 months
Springer Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
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Price distribution over 36 days • 1 price levels
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Most common price: £109 (36 days, 100.0%)
Price range: £109 - £109
Price levels: 1 different prices over 36 days
Description
Key Features
Explores co-integration of micromachined sensors with electronics on single silicon chips using CMOS-SOI technology.
Addresses residual stress extraction and analysis in thin-film layers and their stacking arrangements.
Demonstrates successful gas-flow sensor implementation on dielectric membranes integrated with CMOS circuitry.
Provides technical reference material on sensor miniaturization and process integration without significant cost increase.
Product Specifications
- Brand
- Springer
- Format
- paperback
- ASIN
- 1441939571
- Domain
- Amazon UK
- Release Date
- 29 October 2010
- Listed Since
- 06 July 2010
Barcode
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