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Springer - Micromachined Thin-Film Sensors for SOI-CMOS

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Description

Explore the technical advancements in semiconductor technology with Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration by Springer. This specialized text addresses the complex process of integrating sensors with their associated electronics on a single silicon chip. This approach offers significant advantages for engineers and researchers, including improved performance, higher reliability, and effective miniaturization. By utilizing CMOS-SOI technology, this work demonstrates the successful co-integration of gas-flow sensors on dielectric membranes alongside their electronic components. The content focuses on achieving process simplicity without a significant increase in total costs. Readers will find detailed investigations into the extraction of residual stress within thin layers and their stacking processes. This book serves as a practical guide for understanding the challenges and successes of modern sensor integration in silicon-on-insulator technology.

Key Features

Co-integration strategies for combining sensors and electronics on a single silicon chip for better performance.

Detailed analysis of gas-flow sensors integrated on dielectric membranes using CMOS-SOI technology.

Technical guidance on achieving miniaturization and process simplicity in semiconductor manufacturing.

In-depth investigation into the extraction of residual stress in thin layers and stacking processes.

Practical insights into maintaining cost-efficiency while improving device reliability and scale.

Product Specifications

Format
paperback
Domain
Amazon UK
Release Date
29 October 2010
Listed Since
06 July 2010

Barcode

No barcode data available

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