Springer Electroceramic-Based MEMS: Fabrication-Technology and Applications: 9 (Electronic Materials: Science & Technology, 9)

Applications and Devices.- MEMS-Based Thin Film and Resonant Chemical Sensors.- Microactuators Based on Thin Films.- Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films.- Thick-Film Piezoelectric and Magnetostrictive Devices.- Micromachined Infrared Detectors Based on Pyroelectric Thin Films.- RF Bulk Acoustic Wave Resonators and Filters.- High Frequency Tuneable Devices Based on Thin Ferroelectric Films.- MEMS for Optical Functionality.- Materials, Fabrication-Technology, and Functionality.- Ceramic Thick Films for MEMS.- Thin Film Piezoelectrics for MEMS.- Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices.- Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics.- Microfabrication of Piezoelectric MEMS.- Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics.- Low-Cost Patterning of Ceramic Thin Films.