£150.32

About as cheap as it gets — within 5% of the all-time low it hit 3 months ago.

£150 today · all-time low £145 (Jul 2026) · usually the usual

Springer Electroceramic-Based MEMS Fabrication and Applications

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£150.85 £144.31 £145.73 £147.16 £148.59 £150.02 £151.45 28 July 2026 03 August 2026 09 August 2026 15 August 2026 21 August 2026
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Price range: £145 - £151

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Description

Explore the advanced field of microelectromechanical systems with this technical volume from Springer. This book examines the development of MEMS, which are miniature systems that combine electronics with sensors, transducers, and actuators. It covers the transition from silicon micromachining - used to create structures like cantilevers, membranes, and channels - to the integration of electroceramics into these functional systems. Designed for those studying microelectronics fabrication methodology and IC batch processing techniques, this text provides a deep look into how these miniature devices are manufactured and applied in modern technology.

Key Features

Provides a technical study of Electroceramic-Based MEMS within the Electronic Materials: Science & Technology series.

Covers the fundamental concepts of silicon micromachining for creating structures like cantilevers and membranes.

Explains the integration of electronics with sensors, transducers, and actuators in miniature systems.

Details the application of IC batch processing techniques in the fabrication of microelectromechanical systems.

Published by Springer to support research in microelectronics fabrication and functional system technology.

Product Specifications

Format
hardcover
Domain
Amazon UK
Release Date
03 March 2005
Listed Since
30 December 2006

Barcode

No barcode data available

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