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CRC Press Microfabrication and Nanotechnology Volume 2: Manufacturing Techniques for Microfabrication and Nanotechnology
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Description
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Key Features
Used Book in Good Condition
Product Specifications
- Brand
- CRC Press
- Format
- hardcover
- ASIN
- 1420055194
- Domain
- Amazon UK
- Release Date
- 13 June 2011
- Listed Since
- 30 December 2006
Barcode
No barcode data available
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