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Springer Glow-Discharge Hydrogenated Amorphous Silicon: 4 (Advances in Solid State Technology, 4)
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Description
A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin
Product Specifications
- Brand
- Springer
- Format
- hardcover
- ASIN
- 0792303091
- Domain
- Amazon UK
- Release Date
- 30 November 1989
- Listed Since
- 08 January 2007
Barcode
No barcode data available
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